Proximity Effect Corrections in Electron Beam Lithography Using a Neural Network
Frye, Robert C., Cummings, Kevin D., Rietman, Edward A.
–Neural Information Processing Systems
We have used a neural network to compute corrections for images written by electron beams to eliminate the proximity effects caused by electron scattering.
Neural Information Processing Systems
Dec-31-1991
- Country:
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- Arizona > Maricopa County > Tempe (0.04)
- Europe > France
- Auvergne-Rhône-Alpes > Isère > Grenoble (0.04)
- North America > United States
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