LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing

Feb-12-2026, 14:08:14 GMT–Neural Information Processing Systems

LithoBench consists of more than 120k tiles that are cropped from real circuit designs or synthesized according to topologies of widely adopted IL T testcases.

artificial intelligence, machine learning, mask optimization, (14 more...)

Neural Information Processing Systems

Feb-12-2026, 14:08:14 GMT

Conferences PDF

Country:
- Asia > China
  - Hong Kong (0.04)
- North America > United States (0.04)

Industry:
- Information Technology > Hardware (0.50)
- Semiconductors & Electronics (1.00)

Technology:
- Information Technology
  - Artificial Intelligence
    - Machine Learning > Neural Networks
      - Deep Learning (0.94)
    - Representation & Reasoning (1.00)
  - Sensing and Signal Processing > Image Processing (1.00)

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