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Cummings, Kevin D.
Proximity Effect Corrections in Electron Beam Lithography Using a Neural Network
Frye, Robert C., Cummings, Kevin D., Rietman, Edward A.
We have used a neural network to compute corrections for images written by electron beams to eliminate the proximity effects caused by electron scattering.
Proximity Effect Corrections in Electron Beam Lithography Using a Neural Network
Frye, Robert C., Cummings, Kevin D., Rietman, Edward A.
We have used a neural network to compute corrections for images written by electron beams to eliminate the proximity effects caused by electron scattering.
Proximity Effect Corrections in Electron Beam Lithography Using a Neural Network
Frye, Robert C., Cummings, Kevin D., Rietman, Edward A.
We have used a neural network to compute corrections for images written by electron beams to eliminate the proximity effects caused by electron scattering.