Nova Launches Breakthrough Machine Learning Software to Enhance Modelling Capabilities - DATAVERSITY

The release goes on, "The new solution, which embeds the most advanced machine learning and big data architecture into optical modelling, revolutionizes the way customers utilize metrology measurement data and expands the metrology performance envelope to tighten process windows, avoid process excursions and improve yield. The platform was designed to interface with other process control tools for accuracy improvement and shorter training and control cycles. With this new significant supplement, NOVAFit, in conjunction with Nova's Fleet Management, is now connecting all of Nova's metrology fleet to one big data cluster, which applies smart algorithms to improve the measurements' accuracy and process feedback across multiple fabrication steps. This new approach enhances Nova's capability in measuring multiple parameters in a much more robust method and improves its competitive position."